Low-hole concentration polycrystalline germanium by CO2 laser annealing for the fabrication of an enhancement-mode nMOSFET-Reference-Cited by-同舟云学术

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Low-hole concentration polycrystalline germanium by CO2 laser annealing for the fabrication of an enhancement-mode nMOSFET

Published:2018-09-26 Issue:10 Volume:11 Page:101305
ISSN:1882-0778
Container-title:Applied Physics Express
language:
Short-container-title:Appl. Phys. Express

Author:

Kasirajan Hari Anand,Huang Wen-Hsien,Kao Ming-Hsuan,Wang Hsing-Hsiang,Shieh Jia-Min,Pan Fu-Ming,Shen Chang-Hong

Funder

Ministry of Science and Technology, Taiwan

Publisher

IOP Publishing

Subject

General Physics and Astronomy,General Engineering

Link

http://stacks.iop.org/1882-0786/11/i=10/a=101305/pdf

Reference33 articles.

1. Advances, challenges and opportunities in 3D CMOS sequential integration

2. Low-cost and TSV-free monolithic 3D-IC with heterogeneous integration of logic, memory and sensor analogy circuitry for Internet of Things

3. Enabling 3D-IC foundry technologies for 28 nm node and beyond: through-silicon-via integration with high throughput die-to-wafer stacking

4. Impacts of oxygen passivation on poly-crystalline germanium thin film transistor

5. High carrier mobility in orientation-controlled large-grain (≥50 μm) Ge directly formed on flexible plastic by nucleation-controlled gold-induced-crystallization

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1. Low-temperature process design for inversion mode n-channel thin-film-transistor on polycrystalline Ge formed by solid-phase crystallization;Japanese Journal of Applied Physics;2024-01-05

2. Source/Drain Activation for Flexible Poly-Si Nanoscale pFETs with a Laser-Buffer Layer by CO₂ laser Annealing;ECS Journal of Solid State Science and Technology;2022-06-01

3. Investigation on electrical characteristics of TFTs fabricated with germanium films crystallized by atmospheric-pressure micro thermal plasma jet irradiation;Japanese Journal of Applied Physics;2022-02-09

4. Synthesis, structural, optical, and electrical properties of continuous wave and pulse laser sintered semiconductor Ge films;Semiconductor Science and Technology;2022-01-31

5. Strain effects on polycrystalline germanium thin films;Scientific Reports;2021-04-15

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