Heated ion implantation for high-performance and highly reliable silicon-on-insulator complementary metal–oxide–silicon fin field-effect transistors-Reference-Cited by-同舟云学术

Heated ion implantation for high-performance and highly reliable silicon-on-insulator complementary metal–oxide–silicon fin field-effect transistors

Published:2015-03-05 Issue:4S Volume:54 Page:04DA06
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Mizubayashi Wataru,Onoda Hiroshi,Nakashima Yoshiki,Ishikawa Yuki,Matsukawa Takashi,Endo Kazuhiko,Liu Yongxun,O’uchi Shinichi,Tsukada Junichi,Yamauchi Hiromi,Migita Shinji,Morita Yukinori,Ota Hiroyuki,Masahara Meishoku

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/54/i=4S/a=04DA06/pdf

Reference30 articles.

1. Fabrication and characterization of vertical-type, self-aligned asymmetric double-gate metal-oxide-semiconductor field-effect-transistors

2. Demonstration, Analysis, and Device Design Considerations for Independent DG MOSFETs

3. Fabrication and characterization of vertical-type double-gate metal-oxide-semiconductor field-effect transistor with ultrathin Si channel and self-aligned source and drain

4. Fabrication of FinFETs by Damage-Free Neutral-Beam Etching Technology

5. Experimental Study of Effective Carrier Mobility of Multi-Fin-Type Double-Gate Metal–Oxide–Semiconductor Field-Effect Transistors with (111) Channel Surface Fabricated by Orientation-Dependent Wet Etching

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1. Thermally Robust High‐Resistance Layers on Low‐Resistance Silicon Synthesized by Molecular CO + Ion Implantation;physica status solidi (a);2021-05-03

2. Impact of residual defects caused by extension ion implantation in FinFETs on parasitic resistance and its fluctuation;Solid-State Electronics;2017-06

3. Improved physical models for advanced silicon device processing;Materials Science in Semiconductor Processing;2017-05