Author:
Suzuki Kenta,Youn Sung-Won,Hiroshima Hiroshi
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
10 articles.
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1. Continuous roller nanoimprinting: next generation lithography;Nanoscale;2023
2. Droplet-Dispensed Ultraviolet Nanoimprint Lithography in Mixed Condensable Gas of Trans-1,3,3,3-Tetrafluoropropene and Trans-1-Chloro-3,3,3-Trifluoropropene;Journal of Photopolymer Science and Technology;2022-12-16
3. Analysis of Foaming Characteristics and Physical Properties of Polyurethane Foam according to Foaming Agents;Polymer Korea;2021-05-31
4. Suppression of resist pattern collapse by crosslinker in ultraviolet nanoimprinting involving sequential infiltration synthesis with trimethylaluminum;Journal of Vacuum Science & Technology B;2021-05
5. Solubility Property of Condensable Gases of Trans-1-Chloro-3,3,3-Trifluoropropene and Trans-1,3,3,3-Tetrafluoropropene in UV Nanoimprint;Journal of Photopolymer Science and Technology;2019-06-24