Droplet-Dispensed Ultraviolet Nanoimprint Lithography in Mixed Condensable Gas of Trans-1,3,3,3-Tetrafluoropropene and Trans-1-Chloro-3,3,3-Trifluoropropene
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Published:2022-12-16
Issue:2
Volume:35
Page:135-141
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ISSN:0914-9244
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Container-title:Journal of Photopolymer Science and Technology
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language:en
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Short-container-title:J. Photopol. Sci. Technol.
Author:
Suzuki Kenta1, Okawa Tatsuya1, Youn Sung-Won1
Affiliation:
1. Device Technology Research Institute, National Institute of Advanced Industrial Science and Technology (AIST)
Publisher
Technical Association of Photopolymers, Japan
Subject
Materials Chemistry,Organic Chemistry,Polymers and Plastics
Reference23 articles.
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