Step and flash imprint lithography for manufacturing patterned media-Reference-Cited by-同舟云学术

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Step and flash imprint lithography for manufacturing patterned media

Published:2009 Issue:2 Volume:27 Page:573
ISSN:1071-1023
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Schmid Gerard M.,Miller Mike,Brooks Cynthia,Khusnatdinov Niyaz,LaBrake Dwayne,Resnick Douglas J.,Sreenivasan S. V.,Gauzner Gene,Lee Kim,Kuo David,Weller Dieter,Yang XiaoMin

Publisher

American Vacuum Society

Subject

Electrical and Electronic Engineering,Condensed Matter Physics

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