Effect of thermal annealing on AlN films grown on sputtered AlN templates by metalorganic vapor phase epitaxy
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/57/i=1S/a=01AD05/pdf
Reference31 articles.
1. Impact of strain on free-exciton resonance energies in wurtzite AlN
2. Ultraviolet light-emitting diodes based on group three nitrides
3. Intentional control of n-type conduction for Si-doped AlN and AlXGa1−XN (0.42⩽x<1)
4. An aluminium nitride light-emitting diode with a wavelength of 210 nanometres
5. Influence of initial growth stages on AlN epilayers grown by metal organic chemical vapor deposition
Cited by 38 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Polarity control of sputter-deposited AlN with high-temperature face-to-face annealing;Materials Science in Semiconductor Processing;2023-11
2. High quality AlN film assisted by graphene/sputtered AlN buffer layer for deep-ultraviolet-LED;Nanotechnology;2023-05-09
3. Novel SAW Temperature Sensor with Pt/Ti/AlN/Mo/AlN/Si Structure for High Temperature Application;Chemosensors;2023-04-06
4. Improved Crystallinity of Annealed 0002 AlN Films on Sapphire Substrate;Materials;2023-03-14
5. The relationship between annealing and nitrogen flow ratios during magnetron sputtering of AlN films;Applied Physics A;2023-01-16
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3