Affiliation:
1. State Key Laboratory for Manufacturing System EngineeringXi'an Jiaotong UniversityXi'anShannxi710049People's Republic of China
Publisher
Institution of Engineering and Technology (IET)
Subject
Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering
Reference15 articles.
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2. Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers
3. Miniaturization of Vibratory Beam Accelerometer by using PZT
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