Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers-Reference-Cited by-同舟云学术

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Post-CMOS-Compatible Aluminum Nitride Resonant MEMS Accelerometers

Published:2009-06 Issue:3 Volume:18 Page:671-678
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Olsson Roy H.,Wojciechowski Kenneth E.,Baker Michael S.,Tuck Melanie R.,Fleming James G.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/5062320/04914838.pdf?arnumber=4914838

Cited by 68 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Aluminum Nitride MEMS Resonant Pressure Gauges Without Vacuum Packaging;IEEE Electron Device Letters;2024-05

2. A Review on MEMS Silicon Resonant Accelerometers;Journal of Microelectromechanical Systems;2024-04

3. Design and Sensitivity Analysis of a Micro-Resonant Accelerometer With Adjustable Stiffness;IEEE Sensors Journal;2024-03-01

4. An Aluminum Nitride-Based Dual-Axis MEMS In-Plane Differential Resonant Accelerometer;IEEE Sensors Journal;2023-08-01

5. Compensation of the Stress Gradient in Physical Vapor Deposited Al1−xScxN Films for Microelectromechanical Systems with Low Out-of-Plane Bending;Micromachines;2022-07-24

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