An Aluminum Nitride-Based Dual-Axis MEMS In-Plane Differential Resonant Accelerometer
Author:
Affiliation:
1. Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan
2. Institute of NanoEngineering and MicroSystems and the Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
Funder
MOST
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/10198840/10175073.pdf?arnumber=10175073
Reference24 articles.
1. A Novel Trapezoidal ScAlN/AlN-Based MEMS Piezoelectric Accelerometer
2. A Sub-Micro-G Resolution Frequency-Modulated Piezoelectric In-Plane Accelerometer
3. The Design of Aluminum Nitride-Based Lead-Free Piezoelectric MEMS Accelerometer System
4. A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer
5. Microleverage DETF Aluminum Nitride resonating accelerometer
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