A Sub-Micro-G Resolution Frequency-Modulated Piezoelectric In-Plane Accelerometer
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9430449/9430450/09430472.pdf?arnumber=9430472
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A Review of Eigenmode and Frequency Control in Piezoelectric MEMS Resonators;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10
2. An Aluminum Nitride-Based Dual-Axis MEMS In-Plane Differential Resonant Accelerometer;IEEE Sensors Journal;2023-08-01
3. Design of a Novel Self-Test-on-Chip Interface ASIC for Capacitive Accelerometers;IEEE Transactions on Circuits and Systems I: Regular Papers;2023-07
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