Miniaturization of Vibratory Beam Accelerometer by using PZT-Reference-Cited by-同舟云学术

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Miniaturization of Vibratory Beam Accelerometer by using PZT

Published:2012 Issue: Volume:47 Page:1141-1144
ISSN:1877-7058
Container-title:Procedia Engineering
language:en
Short-container-title:Procedia Engineering

Author:

Kanda Kensuke,Nagata Kazuyuki,Yamakawa Takahiro,Iga Yuki,Fujita Takayuki,Maenaka Kazusuke

Publisher

Elsevier BV

Subject

Applied Mathematics

Reference2 articles.

1. Vibrating Beam Accelerometer with Hard Suspension Beams, Dig. of Tech. Papers on The 14th Int. Conf. on Solid-State Sensors;Maenaka;Actuators and Microsystems,2007

2. Microfabrication and Application of Series-Connected PZT elements, Proc. Eurosensors XXIII;Kanda;Lausanne,2009

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1. An integrated packaged resonant accelerometer with temperature compensation;Review of Scientific Instruments;2020-10-01

2. A micro-machined differential resonance accelerometer based on silicon on quartz method;Sensors and Actuators A: Physical;2017-01

3. Microresonant accelerometer composed of silicon substrate and quartz double‐ended tuning fork with temperature isolator;Micro & Nano Letters;2014-10

4. A resonant sensor composed of quartz double ended tuning fork and silicon substrate for digital acceleration measurement;Review of Scientific Instruments;2014-03

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