A micro-machined differential resonance accelerometer based on silicon on quartz method-Reference-Cited by-同舟云学术

A micro-machined differential resonance accelerometer based on silicon on quartz method

Published:2017-01 Issue: Volume:253 Page:1-9
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Li Cun,Zhao Yulong,Li Bo,Cheng Rongjun,Sun Dengqiang,Han Chao,Zhao You

Funder

The National Science Fund for Distinguished Young Scholars

The National Science Fund of China for Creative Research Groups

Industrial Science and Technology Research Project in Shaanxi Province

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference31 articles.

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3. A seismic-Grade resonant MEMS accelerometer;Zou;J. Microelectromech. Syst.,2014

4. Torque measurements of an automotive halfshaft using micro double-ended tuning fork strain gauges;Myers;Sens. Actuators A Phys.,2013

5. A micromachined differential resonant accelerometer based on robust structural design;Park;Microelectron. Eng.,2014

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