A resonant sensor composed of quartz double ended tuning fork and silicon substrate for digital acceleration measurement-Reference-Cited by-同舟云学术

A resonant sensor composed of quartz double ended tuning fork and silicon substrate for digital acceleration measurement

Published:2014-03 Issue:3 Volume:85 Page:035004
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Li Cun,Zhao Yulong,Cheng Rongjun,Yu Zhongliang,Liu Yan

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4868508

Reference24 articles.

1. Piezoresistive sensing with twin-beam structures in standard MEMS foundry processes

2. Micromachined inertial sensors

3. Resonator sensors-a review

4. Resonant silicon sensors

5. W. C. Albert, in Proceedings of the 28th International Instrumentation Symposium, Las Vegas, NV, 1982 (Instrument Society of America, 1982), pp. 33–44.

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and implementation of a temperature-insensitive heterogeneous resonant magnetic field sensor;Sensors and Actuators A: Physical;2024-04

2. A Review on MEMS Silicon Resonant Accelerometers;Journal of Microelectromechanical Systems;2024-04

3. A High-Precision Quartz Resonant Ultra-High Pressure Sensor with Integrated Pressure Conversion Structure;Micromachines;2023-08-25

4. Modeling and Design of Resonant Magnetic Field Sensors in the Scheme of Differential Magnetostrictive Actuation With Compact Bias Magnetic Circuit;IEEE Sensors Journal;2022-05-15

5. A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams;Sensors;2022-01-14