Three-dimensional micro-Fresnel optical elements fabricated by micromachining technique
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19940277?crawler=true&mimetype=application/pdf
Reference4 articles.
1. IC-processed electrostatic micromotors
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