Non-uniform residual stress assembly for free-space optical systems

Author:

Johnstone R. W.,Sameoto D.,Parameswaran M.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference44 articles.

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3. Comtois J, Bright V (1997) Applications for surface-micromachined polysilicon thermal actuators and arrays. Sens Actuators A 58(1):19–25

4. Dechev N, Cleghorn W, Mills J (2002) Micro-assembly of microelectromechanical components into 3-d MEMS. Can J Electr Comput Eng 27(1):7–15

5. Dechev N, Cleghorn W, Mills J (2004) Microassembly of 3-d microstructures using a compliant, passive microgripper. J Microelectromech Syst 13(2):176–189

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