Applications for surface-micromachined polysilicon thermal actuators and arrays-Reference-Cited by-同舟云学术

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Applications for surface-micromachined polysilicon thermal actuators and arrays

Published:1997-01 Issue:1 Volume:58 Page:19-25
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Comtois John H,Bright Victor M

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Performance tradeoffs for a surface-micromachined microengine;Miller,1996

2. Design, fabrication and characterization of electrostatic microrelays;Roy,1995

3. Multi-User MEMS Processes (MUMPS) Introduction and Design Rules;Koester,1994

4. Thermo-magnetic metal flexure actuators;Guckel,1992

5. Micro-machined 1 × 2 optical fiber switch;Field;Sensors and Actuators A,1996

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