IC-processed electrostatic micromotors-Reference-Cited by-同舟云学术

IC-processed electrostatic micromotors

Published:1989-11 Issue:1-2 Volume:20 Page:41-47
ISSN:0250-6874
Container-title:Sensors and Actuators
language:en
Short-container-title:Sensors and Actuators

Author:

Fan Long-Shen,Tai Yu-Chong,Muller Richard S.

Publisher

Elsevier BV

Subject

General Engineering

Reference6 articles.

1. Design considerations for a practical electrostatic micromotor;Trimmer;Sensors and Actuators,1987

2. Design considerations for microfabricated electric actuators;Bart;Sensors and Actuators,1988

3. IC-processed electrostatic micromotors;Fan;Tech. Digest, IEEE Int. Electron Devices Meet., San Francisco, CA, U.S.A.,1988

4. Pin-joints, springs, cranks, gears and other novel micromechanical structures;Fan;4th Int. Conf. Solid-State Sensors and Actuators (Transducers '87), Tokyo, Japan,1987

5. Integrated movable micromechanical structures for sensors and actuators;Fan;IEEE Trans. Electron Devices, ED-35,1988

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