Micromachined structures for thermal measurements of fluid and flow parameters-Reference-Cited by-同舟云学术

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Micromachined structures for thermal measurements of fluid and flow parameters

Published:2001-07-01 Issue:4 Volume:11 Page:311-318
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Baar J J van,Wiegerink R J,Lammerink T S J,Krijnen G J M,Elwenspoek M

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Long/short hot-probe method for determining thermophysical properties

2. Multi-parameter detection in fluid flows

3. Measurement of thermal diffusivity with a guarded-hot-plate device using a dynamic method

4. Vacuum gauging with complementary metal–oxide–semiconductor microsensors

5. Micro‐Pirani vacuum gauge

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