Micro‐Pirani vacuum gauge
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1145163
Reference13 articles.
1. Fast, thermostatic, Pirani gauge
2. Reproducibility of the performance of Pirani gauges
3. A single crystal semiconductor vacuum gauge with extended range
4. Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor
5. A thermal conductivity microstructural pressure sensor fabricated in standard complementary metal‐oxide semiconductor
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