Towards a Gas Independent Thermal Flow Meter-Reference-Cited by-同舟云学术

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Towards a Gas Independent Thermal Flow Meter

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Kenari Shirin Azadi¹,Wiegerink Remco J.¹,Sanders Remco G.P.¹,Lotters Joost C.¹

Affiliation:

1. University of Twente,The Netherlands

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052491.pdf?arnumber=10052491

Reference7 articles.

1. Precise mask alignment to the crystallographic orientation of silicon wafers using wet anisotropic etching

2. Thermal Conductivity Gas Sensor with Enhanced Flow-Rate Independence

3. Modelling and Simulation of a Thermal Flow Sensor for Determining the Flow Speed and Thermal Properties of Binary Gas Mixtures

4. Multi Parameter Flow Meter for On-Line Measurement of Gas Mixture Composition

5. Micromachined structures for thermal measurements of fluid and flow parameters

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thermal Flow Meter with Integrated Thermal Conductivity Sensor;Micromachines;2023-06-21

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