Affiliation:
1. Integrated Devices and Systems Group (IDS), University of Twente, 7522 NB Enschede, The Netherlands
2. MESA+ Institute, 7522 NH Enschede, The Netherlands
3. Bronkhorst High-Tech BV, 7261 AK Ruurlo, The Netherlands
Abstract
This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of identifying the gas type through a simple DC voltage measurement. All wires have the same dimensions of 2000 μm in length, 5 μm in width, and 1.2 μm in thickness. The design theory and COMSOL simulation are discussed and compared with the measurement results. The sensor’s efficacy is demonstrated with different gases, He, N2, Ar, and CO2, for thermal conductivity and thermal flow measurements. The sensor can accurately measure the thermal conductivity of various gases, including air, enabling correction of flow rate measurements based on the fluid type. The measured voltage from the thermal conductivity sensor for air corresponds to a calculated thermal conductivity of 0.02522 [W/m·K], with an error within 2.9%.
Funder
Bronkhorst High-Tech B.V.
TKI
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
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