Thermal stress analyses of multilayered films on substrates and cantilever beams for micro sensors and actuators
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Cantilever transducers as a platform for chemical and biological sensors
2. Optical thin-film interference effects in microcantilevers
3. Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices
4. Development and characterization of membranes actuated by a PZT thin film for MEMS applications
5. Cantilever Sensor for Nanomechanical Detection of Specific Protein Conformations
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