Abstract
Abstract
Sol–gel-processed Y2O3 films were used as an active-channel layer for resistive switching memory (RRAM) devices. The influence of post-annealing temperature on structural, chemical, and electrical properties was studied. Y2O3-RRAM devices comprising electrochemically active metal electrodes, Ag, and indium tin oxide (ITO) electrodes exhibited the conventional bipolar RRAM device operation. The fabricated Ag/Y2O3/ITO RRAM devices, which included 500 °C-annealed Y2O3 films, exhibited less oxygen vacancy and defect sites, reduced the leakage current, increased the high-/low-resistance state ratio of more than 105, and provided excellent nonvolatile memory properties without significant deterioration for 100 cycles and 104 s.
Funder
National Research Foundation of Korea
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
10 articles.
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