Frequency effects in processing plasmas of the VHF band
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference16 articles.
1. High-rate deposition of amorphous hydrogenated silicon: effect of plasma excitation frequency
2. Preparation of a-Si:H Films by VHF Plasma CVD
3. High Deposition Rate P-I-N Solar Cells Prepared from Disilane Using VHF Discharges
4. Comparison of microwave and lower frequency plasmas for thin film deposition and etching
5. Generation of Electron Cyclotron Resonance Plasma in the VHF Band
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3. Electric field nonlinearity in very high frequency capacitive discharges at constant electron plasma frequency;Plasma Sources Science and Technology;2020-03-23
4. VHF-PECVD for a-Si:H and a-SiN:H Film Deposition;Applied Science and Convergence Technology;2019-09-30
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