High-rate deposition of amorphous hydrogenated silicon: effect of plasma excitation frequency
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19870160?crawler=true&mimetype=application/pdf
Reference11 articles.
1. Pankove, J.I., Semiconductors and semimetals, (Academic Press, London 1984),21, Parts A, B, C
2. Takahashi, K., and Konagai, M.: Amorphous silicon solar cells, (North Oxford Academic, London 1986)
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