The frequency dependence of the discharge properties in a capacitively coupled oxygen discharge
Author:
Funder
Icelandic Research Fund
University of Iceland Research Fund
VINNOVA
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://iopscience.iop.org/article/10.1088/1361-6595/aaa880/pdf
Reference78 articles.
1. Capacitively coupled glow discharges at frequencies above 13.56 MHz
2. Frequency effects in silane plasmas for plasma enhanced chemical vapor deposition
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5. Very high-frequency capacitively coupled argon discharges
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