Electric field nonlinearity in very high frequency capacitive discharges at constant electron plasma frequency-Reference-Cited by-同舟云学术

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Electric field nonlinearity in very high frequency capacitive discharges at constant electron plasma frequency

Published:2020-03-23 Issue:4 Volume:29 Page:045003
ISSN:1361-6595
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Sharma Sarveshwar^ORCID,Sirse Nishant^ORCID,Kuley Animesh^ORCID,Turner Miles M^ORCID

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Link

https://iopscience.iop.org/article/10.1088/1361-6595/ab74b5/pdf

Reference47 articles.

1. Frequency effects in silane plasmas for plasma enhanced chemical vapor deposition

2. Frequency effects in processing plasmas of the VHF band

3. High-rate deposition of amorphous hydrogenated silicon: effect of plasma excitation frequency

4. Organic Film Reactive Ion Etching Using 100 MHz rf Capacitive Coupled Plasma

5. Standing wave and skin effects in large-area, high-frequency capacitive discharges

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1. The dynamical behavior of the capacitively coupled argon plasma driven by very high frequency;Modern Physics Letters B;2024-03-12

2. A harmonic study of electric field nonlinearity and field reversal in collisionless capacitive discharges driven by sawtooth-like waveforms;Physics Letters A;2024-02

3. Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices;Physics of Plasmas;2023-10-01

4. Computational Assessment of the Influence of the Structure of High-Frequency Capacitive Glow Discharges on the Excitation Homogeneity of the Active Medium of a CO₂-Laser;2023 IEEE 5th International Conference on Modern Electrical and Energy System (MEES);2023-09-27

5. Kinetic simulation of a 50 mTorr capacitively coupled argon discharge over a range of frequencies and comparison to experiments;Physics of Plasmas;2023-08-01

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