Spatio-temporal evolution of a pulsed chlorine discharge
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference32 articles.
1. Pulse-time modulated plasma discharge for highly selective, highly anisotropic and charge-free etching
2. Negative ion measurements and etching in a pulsed-power inductively coupled plasma in chlorine
3. Silicon etching by alternating irradiations of negative and positive ions
4. Notching as an example of charging in uniform high density plasmas
5. On the origin of the notching effect during etching in uniform high density plasmas
Cited by 59 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma;Japanese Journal of Applied Physics;2023-03-10
2. Limitations of the independent control of ion flux and energy distribution function in high-density inductively coupled chlorine plasmas;Journal of Vacuum Science & Technology B;2023-01
3. Effect of different pulse modes during Cl2/Ar inductively coupled plasma etching on the characteristics of nanoscale silicon trench formation;Applied Surface Science;2022-09
4. On the chemistry mechanism for low-pressure chlorine process plasmas;Journal of Vacuum Science & Technology B;2022-09
5. Fundamental study towards a better understanding of low pressure radio-frequency plasmas for industrial applications;Chinese Physics B;2022-07-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3