One-dimensional, hybrid hydrodynamics-Boltzmann model for electron beam generated plasmas produced in low pressure argon

Abstract

A one-dimensional, hybrid hydrodynamics-Boltzmann model for electron beam (e-beam) generated plasmas in argon at low pressure and a constant magnetic field is developed. The e-beam separates the plasma into two distinct regions: an ionization zone irradiated by the e-beam that creates plasma and reactive species, and a diffusive zone between the e-beam and the chamber wall, where the species diffuse toward the wall. The Boltzmann equation is solved in the ionization zone and the electron energy distribution function is used to calculate rates participating in the species and power balance equations. Comparison of model and experimental data for the radial profiles of the electron density and temperature shows a favorable agreement. All plasma parameters are sensitive to their radial location.