Mass spectroscopic measurement of time-varying ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma

Abstract

Abstract The time dependence of the ion composition in pulse-modulated dual-frequency capacitively coupled plasma with Ar/C4F8/O2 was measured using a quadrupole mass spectrometer with an electrostatic energy analyzer. After turning on the pulse, Ar+ ions were preferentially generated, and then, the composition of C x F y + ions, such as C2F4 + and C3F5 + ions, increased. This phenomenon was discussed on the basis of the time variation of electron temperature and the resultant change in the ratio of the C4F8 ionization rate to that of Ar atoms.