Characterization of the transition from collisional to stochastic heating in a RF discharge
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/43/i=2/a=025209/pdf
Reference25 articles.
1. High-density plasma mode of an inductively coupled radio frequency discharge
2. Mode transitions and hysteresis in inductively coupled plasmas
3. Characteristics of heating mode transitions in a radio-frequency inductively coupled plasma
4. Abnormally low electron energy and heating-mode transition in a low-pressure argon rf discharge at 13.56 MHz
5. Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc/rf sources
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3. Electron heating mode transition induced by mixing radio frequency and ultrahigh frequency dual frequency powers in capacitive discharges;Physics of Plasmas;2016-05
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5. Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias;Chinese Physics B;2014-11
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