Electron heating mode transition induced by mixing radio frequency and ultrahigh frequency dual frequency powers in capacitive discharges-Reference-Cited by-同舟云学术

Electron heating mode transition induced by mixing radio frequency and ultrahigh frequency dual frequency powers in capacitive discharges

Published:2016-05 Issue:5 Volume:23 Page:053514
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Sahu B. B.¹,Han Jeon G.¹

Affiliation:

1. Department of Advanced Materials Science and Engineering, Center for Advanced Plasma Surface Technology (CAPST), NU-SKKU Joint Institute for Plasma Nano Materials (IPNM), Sungkyunkwan University, Suwon 440-746, South Korea

Funder

Ministry of Science, ICT and Future Planning (MSIP)

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4952629

Reference75 articles.

1. Electron heating in capacitively coupled plasmas revisited

2. Electron heating mode transition observed in a very high frequency capacitive discharge

3. Mode Transition Induced by Low-Frequency Current in Dual-Frequency Capacitive Discharges

4. Different modes of electron heating in dual-frequency capacitively coupled radio frequency discharges

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of the RF voltage amplitude on the space- and time-resolved properties of RF–LF dielectric barrier discharges in α–γ mode;Plasma Sources Science and Technology;2024-05-01

2. Experimental studies and COMSOL 1-D simulation in Ar capacitively coupled plasmas;AIP Advances;2024-01-01

3. Exploring the influence of gas flow rate on surface charging issue during plasma etching;Pramana;2022-04-29

4. Study of optical emission spectroscopy using modified Boltzmann plot in dual-frequency synchronized pulsed capacitively coupled discharges with DC bias at low-pressure in Ar/O₂/C₄F₈ plasma etching process;Physical Chemistry Chemical Physics;2022

5. Radially localized electron heating in helicon plasmas by X-wave microwave injection;Physics of Plasmas;2021-02