Different modes of electron heating in dual-frequency capacitively coupled radio frequency discharges
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference52 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Electrostatic modelling of dual frequency rf plasma discharges
3. Independent control of ion current and ion impact energy onto electrodes in dual frequency plasma devices
4. Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma
5. Functional separation in two frequency operation of an inductively coupled plasma
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