Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc/rf sources
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2888516
Reference13 articles.
1. Plasma potentials of 13.56‐MHz rf argon glow discharges in a planar system
2. Capacitive discharges driven by combined dc/rf sources
3. Proceedings of the International Symposium on Dry Process;Lai W. T.,2006
4. M. A. Lieberman and A. J. Lichtenberg,Principles of Plasma Discharges and Materials Processing, 2nd ed. (Wiley-Interscience, New York, 2005), p. 360.
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