Investigation of Capacitively Coupled Argon Plasma Driven by Dual-Frequency with Different Frequency Configurations
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference27 articles.
1. Principles of Plasma Discharges and Materials Processing
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1. Simulations of standing wave effect, stop band effect, and skin effect in large-area very high frequency symmetric capacitive discharges;Plasma Science and Technology;2021-02-26
2. Effects of HF frequency on plasma characteristics in dual-frequency helium discharge at atmospheric pressure by fluid modeling;Plasma Science and Technology;2018-09-04
3. Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model;Chinese Physics B;2017-12
4. On singlet metastable states, ion flux and ion energy in single and dual frequency capacitively coupled oxygen discharges;Journal of Physics D: Applied Physics;2017-03-27
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