On singlet metastable states, ion flux and ion energy in single and dual frequency capacitively coupled oxygen discharges-Reference-Cited by-同舟云学术

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On singlet metastable states, ion flux and ion energy in single and dual frequency capacitively coupled oxygen discharges

Published:2017-03-27 Issue:17 Volume:50 Page:175201
ISSN:0022-3727
Container-title:Journal of Physics D: Applied Physics
language:
Short-container-title:J. Phys. D: Appl. Phys.

Author:

Hannesdottir H,Gudmundsson J T

Funder

Icelandic Research Fund

Swedish Government Agency for Innovation Systems (VINNOVA)

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0022-3727/50/i=17/a=175201/pdf

Reference55 articles.

1. From Fermi acceleration to collisionless discharge heating

2. Self-excitation of the plasma series resonance in radio-frequency discharges: An analytical description

3. Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges

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