Design and performance evaluation of an interferometric controlled planar nanopositioning system
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/23/i=7/a=074011/pdf
Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. NPS6D200—A Long Range Nanopositioning Stage with 6D Closed Loop Control;Applied Sciences;2024-08-08
2. Investigations on tip-based large area nanofabrication and nanometrology using a planar nanopositioning machine (NFM-100);Measurement Science and Technology;2024-05-16
3. Nanopositioning X–Y stage with an embedded Six-DOF error compensation system based on Abbe and Bryan principles;Measurement;2024-03
4. Tip-based nanofabrication below 40 nm combined with a nanopositioning machine with a movement range of Ø100 mm;Micro and Nano Engineering;2023-06
5. Robust Adaptive Tracking Control of a 3D Vertical Motion System for Nanometer Precision Applications;IFAC-PapersOnLine;2023
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