Robust Adaptive Tracking Control of a 3D Vertical Motion System for Nanometer Precision Applications-Reference-Cited by-同舟云学术

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Robust Adaptive Tracking Control of a 3D Vertical Motion System for Nanometer Precision Applications

Published:2023 Issue:2 Volume:56 Page:5332-5339
ISSN:2405-8963
Container-title:IFAC-PapersOnLine
language:en
Short-container-title:IFAC-PapersOnLine

Author:

Huaman Alex S.,Reger Johann

Publisher

Elsevier BV

Subject

General Medicine

Reference18 articles.

1. Control Technologies for Emerging Micro and Nanoscale Systems;Eleftheriou,2011

2. Robust and Adaptive Control with Aerospace Applications;Eugene,2013

3. Design, Modeling and Control of Nanopositioning Systems;Fleming,2014

4. Closed-loop identification revisited;Forssell;Automatica,1999

5. Integrated planar 6-dof nanopositioning system;Gorges;IFAC Symposium on Mechatronic Systems,2019

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