Author:
Stauffenberg Jaqueline,Reibe Michael,Krötschl Anja,Reuter Christoph,Ortlepp Ingo,Dontsov Denis,Hesse Steffen,Rangelow Ivo W.,Strehle Steffen,Manske Eberhard
Funder
Technische Universität Ilmenau
Deutsche Forschungsgemeinschaft
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference38 articles.
1. Chips 2020; the @Frontiers Collection,2012
2. Sub-10-nm fabrication: methods and applications;Chen;Int. J. Extrem. Manuf.,2021
3. Chapter 14 - next generation lithography—the rise of unconventional methods?;Kaestner;Front. Nanosci.,2016
4. Atomic force microscope;Binnig;Phys. Rev. Lett.,1986
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献