Enhancing the thermal conductivity of polymer-assisted deposited Al 2 O 3 film by nitrogen doping
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference34 articles.
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4. The influence of thermally assisted tunneling on the performance of charge trapping memory
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1. Nitrogen-doping boosted the activity of K/Al2O3 catalysts in simultaneous removal of COS and CS2: An experimental and theoretical study;Journal of Environmental Chemical Engineering;2024-04
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3. Chemical bonding of nitrogen formed by nitridation of crystalline and amorphous aluminum oxide studied by X-ray photoelectron spectroscopy;RSC Advances;2020
4. Epitaxial AlN on c-plane sapphire by plasma nitriding;Japanese Journal of Applied Physics;2019-05-01
5. The composition and interfacial properties of annealed AlN films deposited on 4H-SiC by atomic layer deposition;Materials Science in Semiconductor Processing;2019-05
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