Epitaxial Al2O3films on Si by low‐pressure chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.99685
Reference21 articles.
1. Silicon/insulator heteroepitaxial structures formed by vacuum deposition of CaF2 and Si
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3. MBE‐grown fluoride films: A new class of epitaxial dielectrics
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5. Epitaxial relations in group‐IIa fluoride/Si(111) heterostructures
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