2D PIC-MCC simulations of magnetron plasma in HiPIMS regime with external circuit-Reference-Cited by-同舟云学术

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2D PIC-MCC simulations of magnetron plasma in HiPIMS regime with external circuit

Published:2018-10-22 Issue:10 Volume:27 Page:105009
ISSN:1361-6595
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Revel Adrien^ORCID,Minea Tiberiu,Costin Claudiu^ORCID

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Link

http://iopscience.iop.org/article/10.1088/1361-6595/aadebe/pdf

Reference59 articles.

1. Fundamental aspects in non-reactive and reactive magnetron discharges

2. Electron transport in magnetrons bya posterioriMonte Carlo simulations

3. Spoke rotation reversal in magnetron discharges of aluminium, chromium and titanium

4. Species transport on the target during high power impulse magnetron sputtering

5. Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics

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1. Acceleration of particle-in-cell simulations using sparse grid algorithms. II. Application to partially magnetized low temperature plasmas;Physics of Plasmas;2024-07-01

2. Modeling of ion transport from ionization region to entrance of mass spectrometer in HiPIMS argon/Cr target;Journal of Vacuum Science & Technology A;2024-03-29

3. A hybrid plasma model for Cr thin film deposition by deep oscillation magnetron sputtering;Journal of Applied Physics;2024-01-16

4. Growth mechanism and characteristics of electron drift instability in Hall thruster with different propellant types;Chinese Physics B;2024-01-01

5. Speeding-up direct implicit particle-in-cell simulations in bounded plasma by obtaining future electric field through explicitly propulsion of particles;Chinese Physics B;2023-12-01

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