Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics
Author:
Affiliation:
1. Institute for Experimental Physics II, Ruhr-University Bochum, Universitätstr. 150, 44780 Bochum, Germany
2. Technical and Macromolecular Chemistry, Paderborn University, Warburgerstr. 100, 33098 Paderborn, Germany
Funder
Deutsche Forschungsgemeinschaft (DFG)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4977820
Reference44 articles.
1. High power pulsed magnetron sputtering: A review on scientific and engineering state of the art
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4. Gas rarefaction and the time evolution of long high-power impulse magnetron sputtering pulses
5. Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate
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