Sputter depth profile analysis of interfaces
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference261 articles.
1. Electron‐beam effects in depth profiling measurements with Auger electron spectroscopy
2. SIMS Profile quantification by maximum entropy deconvolution
3. The depth resolution of sputter profiling
4. Theoretical and experimental studies of the broadening of dilute delta-doped Si spikes in GaAs during SIMS depth profiling
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