Electron‐beam effects in depth profiling measurements with Auger electron spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.321398
Reference12 articles.
1. Use of Auger Electron Spectroscopy and Inert Gas Sputtering for Obtaining Chemical Profiles
2. OPTIMIZATION OF AUGER ELECTRON SPECTROSCOPY IN LEED SYSTEMS
3. Sputtering yields and Specific energy losses of Ar+Ions with energies from 5 TO 30 KeV AT SiO2
4. The sputtering of oxides part i: a survey of the experimental results
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1. Quantitative Compositional Depth Profiling;Springer Series in Surface Sciences;2012-06-01
2. Application of Electron Beam Assisted Sputtering of SiO2 Thin Films for Lithography;Shinku;2007
3. Electron irradiation effect on depth profiling of a SiO2/Si(100) surface by Auger electron spectroscopy;Applied Surface Science;2005-02
4. Sputter depth profile analysis of interfaces;Reports on Progress in Physics;1998-07-01
5. Advanced surface analysis of silicate glasses, oxides and other insulating materials: a review;Journal of Non-Crystalline Solids;1997-01
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