Sputtering yields and Specific energy losses of Ar+Ions with energies from 5 TO 30 KeV AT SiO2
Author:
Publisher
Informa UK Limited
Subject
General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/10420157408230809
Reference21 articles.
1. Unified sputtering theory
2. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
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