Use of Auger Electron Spectroscopy and Inert Gas Sputtering for Obtaining Chemical Profiles-Reference-Cited by-同舟云学术

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Use of Auger Electron Spectroscopy and Inert Gas Sputtering for Obtaining Chemical Profiles

Published:1972-01 Issue:1 Volume:9 Page:160-163
ISSN:0022-5355
Container-title:Journal of Vacuum Science and Technology
language:en
Short-container-title:Journal of Vacuum Science and Technology

Author:

Palmberg P. W.

Publisher

American Vacuum Society

Subject

General Engineering

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1316542

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