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A ZnO nanowire vacuum pressure sensor

Published:2008-02-11 Issue:9 Volume:19 Page:095505
ISSN:0957-4484
Container-title:Nanotechnology
language:
Short-container-title:Nanotechnology

Author:

Chang Shoou-Jinn,Hsueh Ting-Jen,Hsu Cheng-Liang,Lin Yan-Ru,Chen I-Cherng,Huang Bohr-Ran

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

Link

http://stacks.iop.org/0957-4484/19/i=9/a=095505/pdf

Reference27 articles.

1. Thermal vacuum sensor with compensation of heat transfer

2. Automatic ionization-thermocouple vacuum gage

3. Proposal of a new structural thermal vacuum sensor with diode-thermistors combined with a micro-air-bridge heater

4. A micro-Pirani vacuum gauge based on micro-hotplate technology

5. SU-8 waveguiding interferometric micro-sensor for gage pressure measurement

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