A micro-Pirani vacuum gauge based on micro-hotplate technology-Reference-Cited by-同舟云学术

A micro-Pirani vacuum gauge based on micro-hotplate technology

Published:2006-02 Issue:2 Volume:126 Page:300-305
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Zhang F.T.,Tang Z.,Yu J.,Jin R.C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Miniaturized vacuum gauges;Wilfert;J. Vac. Sci. Technol. A,2004

2. Comparison of different micromechanical vacuum sensor;Bedö;Sens. Actuators A,2000

3. High performance pirani vacuum gauge;Shie;J. Vac. Sci. Technol. A,19952

4. An Innovative Pirani Pressure Sensor;Chou,1997

5. A doubly anchored surface micromachined Pirani gauge for vacuum package characterization;Stark,2003

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