Comparison of different micromechanical vacuum sensors-Reference-Cited by-同舟云学术

Comparison of different micromechanical vacuum sensors

Published:2000-08 Issue:1-3 Volume:85 Page:181-188
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bedö Gerlinde,Kraus Werner,Müller Rudolf

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Theorie und Praxis der Vakuumtechnik;Wutz,1988

2. Thermodynamik. Grundlagen und technische Anwendungen;Stephan,1986

3. R. Aigner, Systemeigenschaften von Silicium-Planar-Pellistoren (Properties of Silicon Planar Pellistors), Diss. Technische Universität München, 1996.

4. B. Bayha, Monolithische Integration von thermisch modulierten Drucksensoren (Monolithic Integration of Thermal Modulated Pressure Sensors), thesis from the Lehrstuhl für Technische Elektronik, Technische Universität München, 1998.

5. S. van Herwaarden, Thermal Vacuum Sensors Based on Integrated Silicon Thermopiles, Diss. Techn. Univ. Delft, 1987.

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